Used SEMITHERM / SEMITOOL VTP 1500 #293760973 for sale

ID: 293760973
Vertical furnace.
SEMITHERM / SEMITOOL VTP 1500 is a high-quality diffusion furnace and accessory package from SEMITOOL. SEMITOOL VTP 1500 offers multi-zone individual temperature control for maximum efficiency and temperature uniformity. Its zone-by-zone temperature controller provides precise accuracy and repeatability for doping and process uniformity. Its large capacity chamber allows SEMITHERM VTP1500 to process a wide range of size wafers, ranging from 2 inches to diameters of up to 12 inches. Equipped with a 96 zone transfer rod system, SEMITHERM / SEMITOOL VTP1500 is capable of simultaneous heating and cooling for fast, uniform process results. In addition to its outstanding temperature uniformity, VTP 1500 offers a comprehensive set of safety features. It has an in-built safety and alarm system to ensure the safety of personnel, alerting them to any potential danger before it becomes a problem. It also can be provided with a temperature linear-ization circuit to ensure stable temperature readings in all climates. VTP1500 also includes a vacuum leak detection system, which can detect any leakage and seal off the chamber if necessary. This eliminates future problems and ensures a safe operation. An integrated gas flow control makes precise gas flow process adjustment both possible and easy. SEMITOOL VTP1500 is a multifunctional device capable of diffusion, oxidation, nitridation, pyrolization, and more. Its internal walls are made of molybdenum disilicide and insulators to support high temperature diffusion processes up to 1600 °C. In addition to its high temperature performance, SEMITHERM VTP 1500 is designed for energy savings with an electric heating element that uses up to 90% less energy than other diffusion furnaces. This allows it to operate on a small budget without sacrificing its superior performance. All together, SEMITHERM / SEMITOOL VTP 1500 is an incredibly efficient diffusion furnace and accessory package for demanding applications. Its excellent temperature uniformity and advanced safety systems make it a valuable tool for any application.
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