Used SVG / THERMCO 5100 #9265352 for sale

SVG / THERMCO 5100 is a diffusion furnace designed to provide ultra-high purity and precision furnace performance. It is the ideal choice for conducting reproducible, tight process uniformity and rapid process cycle times. SVG 5100 features an award-winning design consisting of seven zones that can be individually controlled or programmed for complete wafer processing. The seven zones are configured to allow for diffusion processing of various sized wafers, from small up to and including large wafers. Each zone is equipped with advanced variable heat zones satisfying all needs when it comes to a process recipe. The different zones are equipped with multiple heating elements, which can be activated in real time to ensure fast and accurate heating for product cycles. The electric properties of the furnace elements vary from zone to zone in order to accommodate for different wafer sizes and processing conditions. The electric elements are precisely controlled to permit different temperatures ranging from 300°C up to 1,500°C. This makes THERMCO 5100 perfectly suited for an array of processes, such as reaction annealing, stress annealing and impurity diffusion in wafers. In order to ensure a consistent and repeatable anneal process, 5100 is outfitted with air circulation fans, and temperature-controlled window vents. The machine is equipped with a programmable timer, allowing users to set the temperature and width of each process cycle. Furthermore, users are able to access and monitor the entire process from a single remote terminal. When used in combination with an inert atmosphere (such as nitrogen or argon), SVG / THERMCO 5100 enables users to achieve an extremely pure diffusion process while maintaining 2°C uniformity throughout the entire process. SVG 5100 also features a range of accesories such as process chambers, pressure equalizing fittings, and vacuum pumps, allowing for many varied applications. THERMCO 5100 is designed for superior safety and performance, with safety interlocks and emergency shut down protection. In addition, the furnace features a complete set of operational alarms that detect process issues and prevents the furnace from catastrophic failure. Overall, 5100 is an exceptionally versatile and reliable diffusion furnace that provides reliable process control with superior safety features. The modular design and advanced features of the furnace provide an efficient and reliable platform for all diffusion process requirements.