Used SVG / THERMCO 5100 #9265353 for sale

SVG / THERMCO 5100 is a diffusion furnace and accessory made by SVG, Inc.designed to provide precise control of wafer diffusion processes. This tool is an advanced lab system that is used for research and development (R&D) and for high temperature diffusion and annealing processes. It is a multi-zone horizontal furnace that boasts a wide range of features including high-temperature capability, precise temperature control, and multiple configurations. This horizontal furnace is composed of an inner insulating shell, an outer case structure, and a multi-zone heating section. It also includes a lift-off cover (LFC) and bellows mechanism for effective bellows operation and excellent uniformity control. The LFC works to ensure low particle count and uniform process temperatures. SVG 5100 is equipped with a CRIUS digital controller and programmable logic controller (PLC) to provide precise, real-time temperature control. The CRIUS digital controller allows for the set-up and monitoring of key temperature settings and real-time readings of the actual operating parameters of the furnace. The PLC provides the process adjustments for uniformity and repeat data and establishes the thermal profiles required of the furnace. This furnace has a heating zone that includes two infrared quartz elements for temperature uniformity across the full wafer width. It also features protective elements, called electrical safety interlocks which prevent accidental damage to the tool. Lastly, the sophisticated temperature control module further optimizes the uniformity of temperatures across the heated zones. THERMCO 5100 also features environmental safety controls that are designed to improve furnace life. An inert gas purging system allows for the introduction of nitrogen, argon, hydrogen, helium, or another inert gas to provide an effective protection against oxidation and contamination. This system ensures the highest standards of safety, cleanliness, and process repeatability for extended periods of time. This affordable and efficient high-temperature diffusion and annealing tool from THERMCO, Inc is ideal for producing highly acceptable wafer uniformity and accuracy for high-volume applications such as semiconductor packaging, MEMS, and Nanochip integration. Its reliable temperature control, excellent process repeatability, and environmental safety features make 5100 an excellent choice for research and development laboratories when quality and precision are of utmost concern.