Used SVG / THERMCO 5100 #9411905 for sale
URL successfully copied!
Tap to zoom
ID: 9411905
Wafer Size: 6"
Vintage: 2011
Horizontal diffusion furnaces, 6"
Stack 1: High temperature oxide
Stack 2: Oxide
Stack 3: P-type oxidation
Stack 4: N-type oxidation
TMX Controller
SCHUMACHER Delivery and bubblers
CRYCO Boat loaders
2011 vintage.
SVG / THERMCO 5100 is a diffusion furnace and accessories equipment ideal for a variety of difficult thermal and chemical processing applications. Equipped with an impressive range of features, SVG 5100 can reliably maximize process efficiency, improve batch uniformity, and reduce cycle time. The main body of THERMCO 5100 System is comprised of a power supply, a pump and a high-vacuum chamber. The power supply, which is housed in a two-door cabinet, allows for precise temperature control and offers precise real-time temperatures. The pumps, which are located inside the main chamber and visible through the viewport, give utmost reliability and ensures the desired process parameters are reached. An additional pump station can be installed inside the chamber, so the user can have up to three sets of pumps. As a result, 5100 shows excellent temperature uniformity throughout the entire chamber. SVG / THERMCO 5100 Unit also offers many advanced accessories to enhance performance and streamline processes. For example, it has a variety of modular wafer carriers, which allow for quick, safe loading and unloading of wafers. It also has multiple vacuum control options, including a manually adjustable valve and an automatic controller, as well as an inert atmosphere control machine if required. Finally, an optional quartz lamp holder with independent power supply is available, so lights can be installed inside the chamber for viewing wafer processing. Combined, these features make SVG 5100 a dependable and highly efficient diffusion furnace and accessories tool. It offers precise temperature control, and its wafer carriers, vacuum control options and supported accessories allow users to customize their asset to their specific needs. This, in turn, leads to higher throughput and more reliable results.
There are no reviews yet