Used SVG / THERMCO 5200 #9250085 for sale

SVG / THERMCO 5200
ID: 9250085
Wafer Size: 6"
Diffusion furnaces, 6".
SVG / THERMCO 5200 Diffusion Furnace is a highly efficient and reliable tool for creating wafers of exact and uniform thicknesses. This fully automated furnace offers a variety of accessorie for customizing the wafer production process so that your production requirements are met with maximum accuracy and precision. SVG 5200 is a single-zone furnace which features an advanced zone temperature control system, providing the perfect atmosphere for chemical vapor deposition (CVD) and chemical-mechanical planarization (CMP) processes. This furnace can achieve temperatures up to 1000C, with uniform and stable temperatures maintained across the entire zone. For maximum accuracy, THERMCO 5200 is equipped with an optical quartz window for continuous monitoring, as well as a gas flow detector system which ensures an optimal level of purity and traceability during the production of new wafers. 5200 is also highly configurable, allowing users to adjust multiple process parameters. By changing the gas flow or the pressure of the annealing atmosphere, users are able to achieve the desired thicknesses and optical properties in their wafers. In order for the high temperature uniformity of SVG / THERMCO 5200 to be maintained, the furnace is equipped with an active water-cooled diffusion liner. The liner helps to ensure optimal results by providing a consistent, steady temperature throughout the entire annealing zone. For even lower thermal gradients, an optional graphite insulation cover can also be installed. In addition to temperature control, SVG 5200 also features advanced process control capabilities, such as pressure monitoring, external gas control, and oxygen depletion control. This ensures that users can maintain strict control of their processes, while reducing their risk for contamination or other production defects. THERMCO 5200 is compatible with a full array of accessories, including a quartz susceptor, quartz lift pins, and a removable graphite jig. 5200 Diffusion Furnace provides an efficient and reliable annealing solution for the production of high-quality, uniform wafers. With its top-tier temperature regulation system, users can rest assured knowing that their wafers will be produced with the utmost accuracy and precision. Thanks to its various configuration options and numerous optional accessories, SVG / THERMCO 5200 offers the versatility and optimization needed for a successful wafer production process.
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