Used SVG / THERMCO / AVIZA 5200 #9225999 for sale

SVG / THERMCO / AVIZA 5200 diffusion furnace is a robust, reliable, and versatile diffusion furnace that is designed to provide years of uninterrupted and superior diffusant processing performance. SVG 5200 offers precise temperature control throughout all stages of diffusion, providing improved process yields. AVIZA 5200 comes equipped with a unique and patented Vertical Steel Framed Hot Zone, which can handle up to four 800mm² wafer carriers simultaneously. This innovative design allows for large-scale production, resulting in a faster turn-around time. The furnace also includes a plasma-enhanced chemical vapor deposition (PECVD) kit, which produces superior quality, low-defect diffused layers, further increasing yields. The furnace is highly flexible and has the capacity to accommodate a wide range of wafer sizes, up to 25 mm in diameter. This feature allows operators to reach a higher throughput without having to transfer wafers or adjust settings. A user-friendly controller ensures that settings and parameters are intuitively and accurately entered and maintained, requiring minimal operator intervention. To ensure maximum safety, 5200 diffusion furnace comes equipped with a variety of safety features, such as fail-safes, open lid detection, and a security system. It also offers excellent thermal performance and environmental protection, maintaining temperature accuracy of ± 1°C in the hot zone and ± 0.1°C in the cool zone. Additional features of THERMCO 5200 diffusion furnace include: multi-program storage and recall, configurable recipes, manual or automatic operation, multiple heating rate options, and system monitoring software. This furnace is designed to ensure users are served with the highest-quality results with its cutting-edge design, superior materials, and unmatched engineering.