Used SVG / THERMCO / AVIZA 5204 #9043980 for sale

SVG / THERMCO / AVIZA 5204 is a diffusion furnace and accessory equipment ideal for wafer processing applications in the semiconductor industry. This system provides optimal temperature control and uniformity for achieving optimal device performance. The chamber size is 375x350x250 mm, and the chamber can reach temperatures up to 1150°C. SVG 5204 features a customized wafer loading unit and internal cassette to cassette transport machine. The inboard temperature sensor ensures accuracy and controls temperature profiles. The radial diffusion time is simple to set up and offers wide repeatability. Other features include a Precision Swing Arm Load Lock (PAL) chamber, high grade ceramic fascia, solid state power control circuitry, and PID control with AutoTune tool. The heating element of AVIZA 5204 is a grounded electrical resistance element with a resistance of 1 ohm per element. This ensures even temperature distribution in the chamber. The temperature control is accurate and consistent throughout the process. There is also an independent heat trapping shield between the heating elements and the chamber for improved safety and temperature accuracy. The diffusion furnace also features a gas distribution nozzle for uniform gas flow. It has a stainless steel bellows for gas circuiting, as well as a separate on/off switch for the exhaust fan. The fan can be adjusted for the desired rate for maximum efficiency. The on-board computer also monitors and logs all data to ensure control and traceability. In addition, 5204 accessories include a graphite susceptor, high-temperature dynamic process cables, high-temperature process line flanges, and a low-temperature aggressive process line plug. Each accessory serves an important purpose in the overall design of the furnace asset. THERMCO 5204 diffusion furnace and accessory model ensures accurate, consistent, and repeatable results throughout the wafer fabrication process. It is an ideal choice for semiconductor manufacturers and research labs that are looking for reliable, efficient, and cost-effective solutions.