Used SVG / THERMCO / AVIZA AVP 8000 #9172756 for sale
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ID: 9172756
Wafer Size: 8"
Vintage: 2002
Vertical LPCVD furnace, 8"
SELOX
Process type: Selective oxidation
System interface:
Computer: Sun ultra 5
System software: AVP Software version 2.6.1
Printer assy: No
Interlock test procedure: TBD
AC Power input options and line frequency: 480 VAC, 3 phase, 60 Hz
Wafer type: Notch
SMIF: No
Cassette type: Entegris
Cassette model: KA202-80SH-47C02
Carousel:
(16) Cassettes
(2) Levels
Wafer counter: Present
End effector type: Optical sensor
Includes:
Post process exhaust burning unit
Heater element:
(5) Zones
Mid temp
P/N: 602783-08
Torch assy:
P/N: 172441-003
Torch spike TC:
P/N: 739655-001
Torch injector TC:
P/N: 739603-001
Thermo-couple type: R
Profile:
P/N: 910601-001
Spike:
P/N: 103365-01
Over temp:
Zones: 1-4
P/N: 103281-01
Over temp:
(5) Zones
P/N: 103365-01
Scrubbed exhaust: 4" Bottom
Cabinet (non-scrubbed) exhaust: 6", top
Door oring: Face seal / O-Ring
P/N: 105640-02 / 781053-003
TCA Controller: No
Door: Stainless steel door
P/N: 601486-02
Quartz:
Tube: Dual-wall
(1) Piece
P/N: 105678-01
Liner: No
Silicon carbide element liner: No
Quartz boat: No
Silicon carbide boat: Present
P/N: 109085-03
Pedestal assembly: Present
P/N: 108930-01
Silicon carbide baffle: Present
P/N: 109086-01
Quartz crossover: No
Quartz external Ox (Troch) chamber:
(1) Piece
P/N: 815016-665
Torch assy: External
Exhaust elbow: Present
P/N: 105936-01
TC/Seath: Integrated into quartz tube
Gas panel: Gas schematic
Gas panel:
P/N: 606820-01 Rev: 4
P/N: 606821-01 Rev: 5
MFC Type: Unit 1660 / Tylan FC 2900
N2 Dilution: 500 SLPM (Oriface)
H2 Low MFC: (1) SLPM
P/N: 910459-146
H2 High MFC: (30) SLPM
P/N: 910459-155
Purge N2 MFC: No
UHPO2 MFC: (3) SLPM
P/N: 910459-154
UHPN2 Low MFC: (2) SLPM
P/N: 908165-012
UHPN2 High MFC: 30 SLPM
P/N: 910459-009
Gas filter size / Type: Wafer guard
P/N: 907063-010, 001
Gas panel N2 pressure gauge size / Type:
Span pressure transducer: 0 - 250 psia
P/N: 701990-003, 002
P/N: 1-909909-001
Gas panel O2 pressure gauge size / Type:
Span pressure transducer: 0 - 250 psia
P/N: 710990-002
Gas panel H2 pressure gauge size / Type: No
P/N: 701990-003
Gas panel N2 size / Type: No
P/N: 710990-002
Gas panel N2 regulator size / Type:
Tescom: 0-60 psig
P/N: 1-908552-001
Gas panel O2 regulator size / Type:
Tescom: 0-60 psig
P/N: 1-908552-001
Gas panel H2 regulator size / Type:
Tescom: 0-60 psig
P/N: 1-908552-001
Gas panel N2 regulator size / Type:
Tescom: 0-60 psig
P/N: 1-908552-001
Boat area N2 purge: Flow control
Carousel area N2 purge: Flow control
Pressure settings:
UHPN2: 45 ± 10 psig / (55) SLPM
UHPO2: 45 ± 10 psig / (3) SLPM
N2 Purge: 45 ± 10 psig / (30) SLPM
H2: 45 ± 10 psig / (30) SLPM
N2 Dilution: 60 +5, -0 / (500) SLPM
N2 Automation: 100 psig
2002 vintage.
SVG / THERMCO / AVIZA AVP 8000 is a diffusion furnace equipment designed for a variety of annealing and diffusion processes in manufacturing, research and development and industrial applications. The system is available in different configurations and sizes, depending on the size and type of process required. The unit features include a load capacitive of up to 30kg, a chamber size of up to 38 x 66 x 23, a temperature range of 10 to 1000°C, and a high temperature uniformity of ±1°C and a accuracy of ±1°C. The machine also includes programmable temperature controllers, programmable ramp rates, setpoint control and cooling capability. SVG AVP 8000 family of systems also includes a variety of accessories, such as a quartz protection tube, a spin spinner, a temperature monitor, a vacuum pump, a vacuum gauge, and a variety of sensors, such as pyrometers, thermocouples, radiation pyrometers and sheath thermocouples. The tool also features a variety of process platforms, such as single wafer, multiple wafer, batch and continuous. The asset features an ultrasonic hot loading model, automatic door opening and closing and hydrogen feed capability. The equipment also features an oxygen purging capability, which helps to eliminate false readings caused by environmental contaminants. The system also features a built in cooling cycle to prevent overheating and melting of materials. The unit also features a flux control, which enables the operator to adjust the amount of flux used for the diffusion process. The machine can be operated remotely with a variety of support tools, such as the PV-Pro software. The software provides a graphical user interface that allows users to access the tool's performance and status data, as well as program processes and monitor asset performance. The software includes information on alarms and errors, as well as data logging, which can be utilized to review process performance. The model also includes an integrated data log, which includes all the data logged during the process, including material usage, temperature profiles, setpoints, parameters and results. The data can be used to review the process performance and optimize the process for future use. The equipment is designed to meet the safety requirements of various applications, such as the Air-Conditioning, Heating, and Refrigeration Institute (AHRI), the Institute of Electrical and Electronics Engineers (IEEE) and the International Safety Instruments Association (SIA). In addition, the system is designed for remote access via Ethernet connection, which allows for communication of data from the unit to other systems. The machine also features a wide range of accessories, such as shutters, heat shields and shields, which enable the operator to protect the tool and enable effective operation.
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