Used SVG / THERMCO / AVIZA TMX 2604 #293655631 for sale

SVG / THERMCO / AVIZA TMX 2604
ID: 293655631
LPCVD Furnace.
SVG / THERMCO / AVIZA TMX 2604 is a versatile and powerful diffusion furnace and accessories designed to offer a full range of diffusion bonding and wafer fabrication processes. It is capable of performing heavily loaded processes, as well as ultra-fast thermal annealing processes. SVG TMX 2604 can accommodate substrate sizes up to 300 millimeters, making it suitable for a variety of applications. AVIZA TMX 2604 features an integrated process control equipment with advanced programming capabilities. The user is able to easily create process recipes that match the thermal process, enabling a precise and efficient operation. THERMCO TMX 2604 is equipped with multiple process parameters such as pressure, temperature, vacuum, and atmosphere, which can all be easily monitored during the process. Additionally, the furnace is designed with a compact footprint and includes optional features such as a confined gassing tube, closed-loop cooling system, and optical emissions systems. TMX 2604 uses a diffusion heating unit with a graphite filament to achieve temperatures of up to 1200°C. This makes it suitable for a variety of thermal processes in the 450 to 1200°C range, such as diffusion bonding, wafer bonding, oxidation, annealing, and sintering. It is also equipped with an integrated pumped convection machine, which helps achieve uniform processes. The furnace is designed with automated safety features, such as an emergency e-stop switch, an audible emergency alarm, and an emergency shut-off feature. It also includes multiple smart sensors and several safety interlocks; an exhaust evacuation tool; and an auto-temperature-limit feature, which automatically stops the heating process at predetermined temperatures. Additionally, SVG / THERMCO / AVIZA TMX 2604 is designed with a variety of accessories to ensure user convenience. These include a heating chamber cart; a cooling chamber cart; a robotic substrate transfer arm; a robotic transfer arm; a process chamber adapter; a roller or manipulator arm; and a pressure control asset. The furnace also features easy to maintain parts such as a graphite furnace and vacuum chamber seals, and the components are designed for longevity and low maintenance. SVG TMX 2604 provides a powerful and versatile diffusion furnace with a wide range of furnace accessories for various applications. It offers a robust process control model, an efficient heating equipment, and multiple safety features to ensure a high-quality and reliable process. Additionally, AVIZA TMX 2604 is designed with a variety of convenient accessories and components, making it an ideal choice for a variety of fabrication processes.
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