Used SVG / THERMCO / AVIZA VTR 6000 #26403 for sale
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ID: 26403
Wafer Size: 6" 8"
Vertical Furnace, TEOS, 6", can be configured to 8" capability
Gas system is configurable
as is
early 1990s vintage.
SVG / THERMCO / AVIZA VTR 6000 is a diffusion furnace and accessories package designed for a variety of high-temperature applications, such as sublimation, deposition, oxidation, diffusion, and annealing. The package includes a multi-zone, quartz tube-type oven, with the capability to operate at temperatures up to 1750°C and pressures up to 100 mbar, as well as additional accessories for controlling the environment within the high-temperature chamber. SVG VTR 6000 diffusion furnace utilizes a multiple-zone, quartz tube-type oven chamber and safety systems. The interior of the furnace chamber is built from high-alumina and fused quartz tube to provide uniform thermal performance, while the included safety systems ensure safety and maximum energy efficiency when the furnace is being operated. This includes a pressure relief valve and a switch for cutting off the power supply in the event of a fault. The system also comes equipped with a temperature profile program, allowing users to program preset heating parameters such as temperature, ramp rate, and hold-time of the process. This allows users to carry out sophisticated and repeatable thermal processes. In addition to the diffusion furnace, AVIZA VTR 6000 diffusion furnace and accessories package includes a range of additional accessories, such as gas and gas flow meters, gas pressure regulators, resistance thermometers, relays and sensors, large suction headers, bellows for flexible pressure reduction, fast-heating elements, RS-232 ports for remote communication, and a powerful free-standing S-class control display. The included accessories can be tailored to the user's individual needs and provide greater accuracy and efficiency. VTR 6000 diffusion furnace and accessories package is designed to provide industrial users with a range of features, allowing them to carry out a variety of sublimation, deposition, oxidation, diffusion, and annealing processes. Its combination of features and accessories provide optimization of process parameters and repeatable results, while its safety features ensure the safety of users and maximum energy efficiency.
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