Used SVG / THERMCO / AVIZA VTR 6000 #26404 for sale

SVG / THERMCO / AVIZA VTR 6000
ID: 26404
Wafer Size: 6" 8"
Vertical Furnaces, 6", can be configured to 8" capability POCL3, Atmosphere, O2, N2, Phosphorous Oxychloride as-is early 1990s vintage.
SVG / THERMCO / AVIZA VTR 6000 is a mid-range diffusion furnace and accessory package for precision temperature control and semiconductor processing applications. This diffusion furnace has a maximum temperature rating of up to 1500°C, making it suitable for a wide range of materials including polysilicon, silicon nitride, and aluminum nitride. SVG VTR 6000 is equipped with precise computer control and safety features, allowing for precise temperature and process management. Further, the package includes a turbo pump, and a hot/cold airflow outlet for additional user customization. AVIZA VTR 6000 diffusion furnace is constructed from high-grade ceramic fiber insulation and special alloys, ensure resistance to temperature extremes and longevity in high-performance applications. Its internal chamber measurements include a 9.5-inch diameter and 12-inch high, designed to accommodate larger capacities. The single-zone design features vertical convection heat, with independent adjustment and an adjustable high-temperature fan to direct heat in confined space. The high temperature heating element is located outside of the high-temperature chamber to facilitate faster cool down and temperature stabilization. The package also includes an intuitive computer-based controller, allowing users to configure and fine-tune programmable temperature profiles. It serves as an interface to allow communication, providing accurate temperature and process data, upgradable recipes, and real-time set point adjusting. The PID (proportional, integral, and differential) temperature profile control system ensures greater accuracy and repeatability with respect to a given set point. VTR 6000 has built-in safety features to protect personnel, such as overheat protection and a cooling fan. It includes multiple levels of control and monitoring to ensure that furnace temperature readings remain in the set limits, and the pressurized turbo pump is equipped with an air filter to ensure clean operation. The thermal-efficient design of THERMCO VTR 6000 allows for faster heat up and cool down. This minimized thermal drift delivers greater accuracy and improved process stability. Additional accessories, such as wire feeders and ceramic baths, are available separately. This diffusion furnace and accessory package is a reliable and economically-priced solution for its versatile range of processing applications, including diffusion, oxidation, and annealing. SVG / THERMCO / AVIZA VTR 6000 can be used in a wide range of industries, including laboratories, semiconductor, and optoelectronic manufacturing.
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