Used SVG / THERMCO / AVIZA VTR 6000 #293597262 for sale

SVG / THERMCO / AVIZA VTR 6000 is a diffusion furnace designed for rapid thermal processing (RTP) of semiconductor devices. This highly efficient and reliable furnace features superior temperature uniformity and stability, making it ideal for a wide range of semiconductor processing applications. SVG VTR 6000 is comprised of a vacuum-tight stainless steel processing chamber, a process gas manifold, and a backside cooling platen assembly. The chamber is equipped with a bottom-loaded extruder. The extruder, a unique feature of this furnace, allows for a wide range of process configurations and efficiency. AVIZA VTR 6000's gas delivery equipment includes a gas box, a wall-mounted pressure regulator and a proportional valve, which provides precisely controlled full-range process gases that can be delivered to the substrate. Additionally, the furnace is equipped with an electronic temperature controller which provides rapid heating and cooling cycles, enabling quick programming and recipe changes without process interruption. The controller also features a simple graphical user interface. VTR 6000's backside cooling platen assembly distributes power along three channels for vertical and horizontal temperature uniformity across the substrate. The cooling platen further increases the uniformity and accuracy of temperature control, eliminating temperature over- or under-shoot. THERMCO VTR 6000 includes advanced safety features such as an auto-shutdown system to protect against excessive process temperatures. This feature is especially important as it prevents overheating of the substrate and catastrophic substrate failure, thus ensuring a safe and productive working environment. Additionally, SVG / THERMCO / AVIZA VTR 6000 features an air filtration unit to provide clean air circulation within the furnace, minimizing the risk of contamination. In summary, SVG VTR 6000 is an extremely reliable diffusion furnace designed for rapid thermal processing applications. It features an efficient gas delivery machine, an electronic temperature controller with user-friendly GUI, a backside cooling platen assembly for improved temperature uniformity, as well as advanced safety features including an auto-shutdown tool and air filtration asset. With its superb performance, reliability, and safety features, AVIZA VTR 6000 is the ideal choice for semiconductor processing applications.