Used SVG / THERMCO / AVIZA VTR 6000 #9168600 for sale

SVG / THERMCO / AVIZA VTR 6000 is an advanced diffusion furnace and accessories package designed to meet challenging stringent requirements. The equipment is capable of performing up to 6000 wafers per hour with either single-wafer or batch-processing technology, enabling higher throughput with lower costs. The system offers an impressive array of features and capabilities. SVG VTR 6000 features an innovative Loaded Wafer Stacking Carousel that can be loaded with up to three wafers per turn, increasing throughput capacity significantly. Its chemical stations are designed for fast and accurate chemical injections, while the Precise Wafer Placement Mechanism helps ensure accurate alignment of wafers. The precision temperature control throughout the chamber is especially beneficial for uniform non-oxidizing atmospheres during diffusion operations. For ease of operation and enhanced safety, AVIZA VTR 6000 is engineered with advanced fault monitoring and diagnostics capabilities. The full-color graphical LCD touch screen interface enables easy operation and displays real time process parameters, while monitoring systems and optional pressure sensors provide comprehensive process control. The unit also offers reliable machine monitoring and diagnostic capabilities with an optional Optical Emission Spectrometer (OES) for detecting any harmful contaminants present in the chamber. Furthermore, the integrated Electrical Substrate Analyzer (ESA) helps to monitor the progress of diffusion processes. To maximize user convenience, THERMCO VTR 6000 is designed to be integrated with robotic systems and wafer load lock systems. It also features an intuitive software program that helps users quickly configure their recipes. In addition, the tool is capable of storing up to 10,000 recipes for easy retrieval. To maximize uptime, the asset also comes with a cable-free connection model that reduces the time required for maintenance and repairs. Overall, VTR 6000 diffusion furnace and accessories provide a cost-effective and reliable solution for a wide range of applications. The advanced equipment design, comprehensive system monitoring and diagnostic capabilities, intuitive software program, and cable-free maintenance unit ensure reliable, cost-effective performance and superior user convenience.