Used SVG / THERMCO / AVIZA VTR 7000 #26396 for sale
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ID: 26396
Vertical Furnaces, Nitride, 6", can be configured to 8" capability
Gas system can be configured
As is.
SVG / THERMCO / AVIZA VTR 7000 is a high performance diffusion furnace and is designed for use in research and development laboratories in the semiconductor industry. SVG VTR 7000 is built to provide reliable, precise thermal processes and features low-profile submersible heaters to deliver clean heat throughout the process chamber. AVIZA VTR 7000 also features precise temperature control and uniformity with uniform thermal control that is substantially better than traditional diffusion furnaces. THERMCO VTR 7000 can also operate at temperatures up to 3500°C and can be used to deposit and etch materials such as silicon, gallium arsenide, and aluminum. To ensure uniform thermal control, VTR 7000 features low-profile submersible heaters that are contained in the process chamber. The heaters use advanced heating materials and can reach temperatures between 50°C and 1500°C, depending on the configuration. SVG / THERMCO / AVIZA VTR 7000 also features a variety of other advanced heating components, including a ceramic top for uniform thermal control, a ceramic-reinforced coil for heat delivery, and an electric boost heater. This provides excellent heat uniformity and precise thermal control across the entire process chamber. In addition to providing precise thermal control, SVG VTR 7000 also features high-performance vacuum capabilities. The equipment can reach vacuum levels up to 8 x 10-6 Torr and operates at chamber pressures of up to 10-4 Torr to achieve adequate operating temperature. With the ability to reach temperature ranges up to 3500°C, AVIZA VTR 7000 is capable of performing a variety of diffusion processes, including Rapid Thermal Processing (RTP). THERMCO VTR 7000 also features advanced safety mechanisms to ensure user safety throughout the entire process. This includes automatic device shutdown functionality in the event of abnormal temperature exceeds, abnormal power levels, and other safety conditions. The system also features advanced diagnostics that allow unit status to be monitored and faults to be identified to prevent further damage in the process chamber. In addition to providing reliable and precise thermal control, VTR 7000 is also constructed to provide high-performance cooling capability. This is enabled by a dual-stage cooling machine that provides high velocity, low pressure coolant flow for cooling the outside of the chamber and the inside of the chamber simultaneously. The tool also features a rapid response heat transfer ceiling to quickly equalize the chamber temperature and a cryogenic feed line for optimal coolant circulation. Overall, SVG / THERMCO / AVIZA VTR 7000 is a powerful diffusion furnace designed for precision and reliability. Built with an array of advanced components and safety mechanisms, SVG VTR 7000 is capable of operating at extreme temperatures for various diffusion processes. With a low-profile submersible heater, temperature control with uniformity, and high-performance vacuum capability, AVIZA VTR 7000 is an excellent choice for research and development laboratories in the semiconductor industry.
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