Used SVG / THERMCO / AVIZA VTR 7000 #26401 for sale

SVG / THERMCO / AVIZA VTR 7000 is a diffusion furnace and accessories, specifically designed for high-temperature processing of semiconductors over a wide range of temperatures. The equipment features an advanced-design, microcontroller-based control with multiple programmable setpoints, ramp rate and furnace parameters that ensure precise thermal processes even in highly dynamic environments. SVG VTR 7000 supports a wide range of processes, including diffusion, oxidation, nitridation, annealing, ion implantation and sputter deposition. AVIZA VTR 7000 features a robust stainless steel cabinet, provided with a thermally insulated door. A chamber heater with a maximum temperature of 1150°C is incorporated into the unit, along with a horizontal rod-type cold wall design, providing excellent temperature uniformity across the entire vacuum chamber. The system is designed to optimize heat transfer efficiency by incorporating superior chamber insulation and incorporating advanced temperature profile controls. The furnace supports wafer sizes up to 200mm and uses an effective, closed-loop PID control algorithm for good process control and stability. Its advanced control module provides for multiple PID and on/off heater control, an up/down staircase control program and a backfill program that helps keep the furnace at a constant temperature. The furnace has a 2-mode chamber fan unit to maintain uniform temperature distribution in the chamber. The exhaust machine on VTR 7000 includes a high-efficiency filter and scrubber. THERMCO VTR 7000 is also equipped with a pyrometer and multiple temperature sensors, which measure temperatures within the furnace accurately to ensure repeatable results. In addition, the tool is designed with a protective board to minimize the effects of any thermal breakdown. With its onboard power monitor, SVG / THERMCO / AVIZA VTR 7000 ensures safety and reliability for its operators. SVG VTR 7000 can be combined with a variety of additional accessories designed to improve the performance of the asset. These include anodizing, cooling systems, specialized control systems, process chambers and many other options. These accessories allow for a custom-tailored solution that meets any specific process requirements. Overall, the SVAVIZA VTR 7000 is an automated, high-temperature, diffusion furnace and accessories model that enables uniform and precise diffusion processing over a wide range of temperatures. It features robust hardware, advanced temperature control and monitoring features along with a wide range of accessories, making it a great choice for semiconductor manufacturing.