Used SVG / THERMCO / AVIZA VTR 7000 #26405 for sale
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ID: 26405
Wafer Size: 8"
Vertical Furnaces, Nitride, 8" w/ Carousel and Asyst, as-is.
SVG / THERMCO / AVIZA VTR 7000 is a diffusion furnace and accessory equipment designed for advanced deposition of reactive and non-reactive materials. It is a complete thermal processing system offering precise thermal control, precise temperature uniformity, and quick cycle times. SVG VTR 7000 is a high-tech diffusion furnace designed to provide superior diffusion performance and improved atmospheric control capabilities. AVIZA VTR 7000 features a 3.7 kW tubular gas-fired IR heater and six short length, split-coil IR heaters, which are fitted between two 4.1" thick ceramic fiber insulated thermal walls that can control temperature spreads within 1°F. In addition, VTR 7000 features an advanced PID/fuzzy logic controller providing precise temperature settings, fast response times, and repeatable results for a wide range of applications. THERMCO VTR 7000 also incorporates a water-cooled diffusion chamber complete with pressure tapping valves to monitor vacuum levels. SVG / THERMCO / AVIZA VTR 7000 also includes several accessories to facilitate ease of use and enable special processes such as wet chemistry. The accessories include a tapered vacuum lock for quick wafer-loading, diode contact heaters, vacuum seals, pressure regulating valves, and an automated material handling unit for reliable deposition of fragile materials. SVG VTR 7000 is an advanced thermal process machine designed to provide superior quality and performance. The tool is ideal for a wide range of applications including semiconductor, photoelectronic and optoelectronic device fabrication, as well as ceramics and glass manufacture. AVIZA VTR 7000 also is good for a range of custom applications such as thermal and mechanical stress control testing, chemical vapor deposition (CVD) of functional films, and other complex research and development. VTR 7000 is capable of performing diffusion processes at temperatures up to 2800°C with rapid temperature ramp rates and short cycle times. It also offers a wide range of protective features to ensure safety and minimize the possibility of an accident. The included safety features include over-current and over-temperature protection, thermal coupling shutoff, emergency heating shutoff, and a visual alarm asset to alert you of any malfunction. THERMCO VTR 7000 is also user-friendly and comes with a wide range of software features and programs designed to optimize the production process. The range of software features include an automated front-end programming model, real-time monitoring, cycle sequencing, multiple product recipes and a series of pre-set commands. All of these features make SVG / THERMCO / AVIZA VTR 7000 a highly efficient and user-friendly thermal process equipment.
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