Used SVG / THERMCO / AVIZA VTR 7000 #293811744 for sale

SVG / THERMCO / AVIZA VTR 7000
ID: 293811744
Wafer Size: 8"
Low‑Pressure Chemical Vapor Deposition (LPCVD) vertical furnace, 8" Dual cassette tree Processes: Poly, Nitride, and combination.
SVG / THERMCO / AVIZA VTR 7000 is a diffusion furnace and accessory suite used for processing wafers in a range of semiconductor materials. This equipment is ideal for achieving high-quality, controlled doping levels for semiconductors as it provides high-temperature uniformity and thermal management. SVG VTR 7000's diffusion furnace features a fully-enclosed, water-cooled design, allowing for accurate temperature control and low thermal drift. An advanced digital temperature controller offers precise temperature setting and ramping capability. AVIZA VTR 7000 also utilizes multiple thermocouple probes to provide homogenized temperatures within the furnace. VTR 7000 contains several additional components to provide a complete thermal management system. These include an exhaust blower manifold, door interlock unit, and energy management systems. The exhaust blower machine is designed to extract excess heat, allowing for more efficient and uniform thermal management. The door interlock tool can be used to limit access to the furnace's interior, thus ensuring personnel safety while increasing longevity of the furnace. Finally, the energy management asset helps reduce electricity consumption, allowing for more efficient operation. THERMCO VTR 7000 features an infrared pyrometer for measuring incoming wafer temperature, as well as a quartz viewing window for visual monitoring. Additionally, SVG / THERMCO / AVIZA VTR 7000 comes with multiple options for customized work cells, with compatible loading and unloading systems from leading semiconductor manufacturers. This allows for easy installation, as well as increased process efficiency. In conclusion, SVG VTR 7000 provides all the necessary components for sophisticated diffusion furnace processes in the semiconductor industry. Its dual zone design and infrared pyrometer, combined with its advanced sensing and control elements, ensure accurate and repeatable thermal management of semiconductor materials. Additionally, a wide range of compatible loading and unloading systems allow for increased process efficiency. This makes AVIZA VTR 7000 an ideal choice for those looking to achieve precision and efficiency at the highest level.
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