Used SVG / THERMCO / AVIZA VTR 7000 #30056 for sale
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ID: 30056
Wafer Size: 5" 6"
Silicon Nitride Vertical Furnace
Has Dichlor (DCS), SiH4, and NH3
Black Max element 402-914401 (3 zone unit)
Plumbed NPCVD nitride with a Silane line
Compatible with 8" if element is changed - Configured for 5"-6"
Includes Plumber for Si3N4 with SiH4 line plumped
Does not have vacuum plumbing or pumps
Can be inspected
Currently stored in a warehouse.
SVG / THERMCO / AVIZA VTR 7000 is an advanced diffusion furnace and accessory equipment that utilizes state-of-the-art materials to provide an outstanding annealing and thermal processing environment. SVG VTR 7000 is a stand-alone system that is equipped with everything necessary to provide outstanding annealing and thermal processing results. It features a powerful, digitally controlled resistance heating unit, high-speed recirculation fan, and advanced controls for optimum performance. The furnace also includes a 420V/220V mains power supply with a 3-phase converter unit. The computer control machine of AVIZA VTR 7000 is equipped with a touch-screen interface and is highly programmable to enable the user to program the exact parameters of thermal processing as needed. Additionally, the user can monitor the process with real-time and historical logging features. The tool is capable of a wide variety of temperature profiles, including ramp and soak cycles, constant temperatures, and multiple temperature combinations. The annealing and thermal processing enclosure provided by VTR 7000 is highly efficient and reliable. Its single-chamber design eliminates exhaust fans and permits faster heat-up and cool-down cycles. The enclosure is also made from high-performing, yet lightweight, materials to enable outstanding temperature uniformity and insulation efficiency. THERMCO VTR 7000 is constructed from stainless steel, which makes it corrosion resistant. The chamber also features two ceramic sample introduction/removal tubes that enable convenient access for sample preparation. Additionally, the sample introduction/removal tubes are designed to provide a complete heating environment for the samples, ensuring even heating throughout. SVG / THERMCO / AVIZA VTR 7000 comes with a variety of annealing and thermal processing accessories that make it an even more powerful and flexible asset. These include an attached quartz pipe, graphite hearth, alumina shelf and boats, crucibles and sample baskets. The accessories are durable and easy to use and make sample preparation quick and simple. Overall, SVG VTR 7000 is an advanced, yet reliable and user-friendly, diffusion furnace and accessory model that is ideal for annealing and thermal processing to obtain superior results. With its superior heating equipment, advanced control features, and durable accessories, this system is perfect for even the most demanding of thermal processing needs.
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