Used SVG / THERMCO / AVIZA VTR 7000 #68580 for sale

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ID: 68580
Wafer Size: 8"
Vintage: 1995
Anneal vertical furnace, 8" Specifications: Wafer size: 8" 4-Cassette load arrangement Maximum wafer load: 160 2-Boat / single tube system 3-Zone heating element Anti-static system Heat deflector option Pressure control to 2 Torr MKS 652 pressure controller Single disk floppy recipe system Quartzware set Gas system: MFC 1: UNIT 1268A 20slm N2 MFC 2: UNIT 1268A 20slm H2 MFC 3: UNIT 1268A 20slm 10%H2/N2 MFC 4: UNIT 1268A 20slm N2 MFC 7: PORTER 200slm N2 Power requirements: 208V, 100A 1995 vintage.
SVG / THERMCO / AVIZA VTR 7000 is a diffusion furnace and accessories designed for high precision furnace needs. The equipment is designed for difficult to reach samples with tight tolerance requirements and various sizes. It is an ideal tool for tool and equipment manufacturers who require a high standard of accuracy and precision in the manufacturing of their products. SVG VTR 7000 is designed to perform a wide range of diffusion furnace processes such as annealing, oxides, nitriding and other related processes using single or multiple heating cycles. AVIZA VTR 7000 is equipped with a variety of features for process efficiency. It is constructed of stainless steel and utilizes high power RF induction heaters and other state-of-the-art technology to ensure optimum performance and uniform heating of the sample. It includes an advanced automatic process controller which implements maximum flexibility in programming of the process parameters. It also offers an intuitive user interface to easily adjust the settings. The system is 100% automated and provides an excellent environment for a variety of processes including annealing, oxidation, nitriding, sputter deposition and more. THERMCO VTR 7000 offers a broad temperature range with a high accuracy of 0.1%. It is equipped with a computer-controlled safety unit that includes interlocks, protection against temperature overshoot and cooling protection for safety and energy efficiency. The diffuser hardware of VTR 7000 is designed with advanced materials and offers a wide range of diffusion capabilities. It provides excellent reliability and performance. With a variety of sizes and designs available, the diffuser hardware can be customized to meet any application requirements. SVG / THERMCO / AVIZA VTR 7000 provides a comprehensive library of predefined processes and recipes for fast and easy setup of various furnace tasks. It also allows for easy import of additional process parameter data for the most advanced and sophisticated applications. The machine can be easily integrated into the customer's production line. For flexibility and convenience the tool can be configured with a variety of different accessories. These include an auto- load/unload shuttle, rapid cycle, multi-temperature and auto door controllers. The accessory package also includes a range of heating elements, a process monitoring asset, power supply and more. In short, SVG VTR 7000 is a high tech, efficient and reliable diffusion furnace and accessory package designed for precise applications. It offers maximum flexibility, accurate temperatures, advanced safety, and excellent customizability.
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