Used SVG / THERMCO / AVIZA VTR 7000 #9168927 for sale
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ID: 9168927
Wafer Size: 6"
Vertical LPCVD furnace, 6"
Process: TEOS
(1) Chamber
(1) Mainframe
EDWARDS iQDP80 / QMB500 Pump
Gas manifold box
TEOS Transfill
Transformer
Power control unit.
SVG / THERMCO / AVIZA VTR 7000 is a diffusion furnace and accessory unit designed for cost-effective, industrial grade processing for semiconductor substrates. This advanced furnace uses Dual-Purpose Showerhead with Patented Flux Concentration Technology to deliver precise process control with optimal thermal uniformity and low particle contamination. SVG VTR 7000 features a reliable, high-temperature design that can reach up to a maximum temperature of 1200°C. The robust furnace chamber is constructed with heavy-duty, high-temperature insulation material to maximize performance and ensure that the temperature remains controlled and consistent. The advanced control equipment offers precise feedback to adjust gas flow rate, pressure, and temperature to ensure accurate process results. It also features a digital display to show parameter readings, and alarm monitoring to notify the user in the event of any unexpected result. AVIZA VTR 7000 includes a high-efficiency heating system that utilizes inert gas to optimize the process temperatures. The optimized design increases the efficiency of pre-programmed programs and reduces equipment downtime. In addition, the advanced cooling unit reduces the accumulation of heat, eliminating the need for frequent temperature adjustments. VTR 7000 also comes with a patented gas distribution technology for precise gas control and uniform gas distribution. The advanced gas control machine allows users to manually adjust gas composition, as well as to set predetermined rates based on their specific requirements. The inert gas supply is also connected to the chamber to ensure clean and reliable operation. The easy-to-operate touch interface is provided to enable easy operation and control of the process. Overall, THERMCO VTR 7000 is a reliable, cost-effective diffusion furnace with exceptional performance and robust features. Utilizing the high-grade insulation materials and advanced gas control systems, this unit provides uniform thermal performance and increased process yields. In addition, its intuitive touch screen interface and alarm tool provide users with up to date feedback on their process status making this unit an ideal solution for industrial diffusion applications.
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