Used SVG / THERMCO / AVIZA VTR 7107 TOX #26400 for sale
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ID: 26400
Wafer Size: 6" 8"
Vertical Furnaces, Wet / Dry Oxide, 6", can be configured to 8" capability
Gas system can be configured
As is.
SVG / THERMCO / AVIZA VTR 7107 TOX is a high-performance, energy-saving diffusion furnace with exceptional equipment efficiency and a range of accessories for specialized diffusion applications. The equipment offers a choice of two distinct technologies for a single component or multiple component diffusion and includes an advanced, computer-controlled process control system. SVG VTR 7107 TOX is built of robust high grade materials, including stainless steel and ceramic-based components, providing excellent thermal shock resistance. It features an extended dual zone heating chamber with temperature control up to 1,077°C, while also utilizing air-to-gas reburning to ensure an efficient and uniform heat distribution. The unit also features separate or conjoined atmospheres, removable panels and an integrated purge switch to provide efficient and safe processing. As an additional component, AVIZA VTR 7107 TOX comes with an efficient thermal management unit that is designed to reduce energy consumption by up to 30%. Its high-performance turbine fan is able to adjust for precise temperature control and is able to maintain process temperatures independently of the operating temperature. The unit also comes with an adjustable support machine and gas nozzle for better location of parts and for forming a uniform atmospheric pressure within the chamber. The diffusion capabilities offered by VTR 7107 TOX are further enhanced by an extensive list of accessories. These include graphite susceptors designed to evenly distribute the heat around the diffusion chamber, cold wall liners to provide effective heating and cooling, as well as ionizers and ozone generators to help retain a clean and healthy atmosphere. THERMCO VTR 7107 TOX is the perfect choice for a wide range of diffusion applications that require a precise, energy efficient and flexible tool. Its top tier heating and diffusion capabilities provide the required quality to ensure reliable and reproducible results. With its long-lasting components, advanced controllable process, and impressive selection of accessories, SVG / THERMCO / AVIZA VTR 7107 TOX is an ideal choice for a variety of diffusing applications.
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