Used SVG / THERMCO / AVIZA VTR #9278764 for sale

SVG / THERMCO / AVIZA VTR
ID: 9278764
Wafer Size: 6"
Furnaces, 6" 1997-2006 vintage.
SVG / THERMCO / AVIZA VTR is a diffusion furnace and its accessories, ranging from a single-door equipment to a triple-door equipment. This system offers fast and efficient thermal processing for a variety of materials, from single substrates like single-crystalline silicon wafers, to larger frameworks such as substrates or 3D objects. SVG VTR's core components are a crucible-free furnace with right- or left-hand loading, a high-resolution touch screen controller, and high-precision temperature control programs. This unit features an interactive graph showing the time-temperature program in use and can store up to 99 programs in its memory. It is also equipped with an electronic data recorder to monitor and document furnace operations. AVIZA VTR offers a reliable and quick heating cycle, creating a homogeneous temperature profile in a closely monitored environment. The maximum temperature of the machine is 1600°C in air atmosphere and 2400°C in nitride atmosphere. The multi-zone temperature control is digitally set with its dual zone temperature control ports that accurately monitor and control temperature profile, eliminating temperature gradients. To ensure a high quality of the thermal process, THERMCO VTR tool has an integrated recirculation asset that maintains a uniform temperature and homogeneous atmosphere within the furnace chamber. Additionally, the model is equipped with a high-performance radial fan for cooling, which ensures tight control over the temperature profile and shortens the cool down time. Furthermore, to ensure the safety of the users and the precision of the process, VTR is equipped with an auto-leveling feature and two powerful lift cylinders to keep the substrate platform level. Furthermore, SVG / THERMCO / AVIZA VTR distinguishes itself from other systems with its exhaust leak detection technology, the high-pressure shutoff switch, and its advanced electricity protection equipment. SVG VTR system is an ultimate solution for higher thermal process efficiency and accuracy. AVIZA VTR simplifies the installation process, provides greater reliability of operation, and optimizes thermal process quality with its efficient monitoring and control functions. With its accuracy and precision, THERMCO VTR is the best choice for the thermal processing of materials.
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