Used TEL / TOKYO ELECTRON 30X #9241221 for sale
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ID: 9241221
Wafer Size: 12"
Vintage: 2006
Endpoint detection system, 12"
2006 vintage.
TEL (TE) TEL / TOKYO ELECTRON 30X is an advanced diffusion furnace that provides a reliable and efficient means of sample doping and thermal annealing. This diffusion furnace is equipped with multiple sources, including laser diode, resistive wire, and electron beam for different thermal processes. The TE TEL 30X is designed with three independent crucible assemblies optimized for metallization and doping. Additionally, it features the FORSUS and FILTEC Automation, which improve the equipment's overall performance while reducing the complexity of operation. The TE TOKYO ELECTRON 30X diffusion furnace has a maximum temperature of 1025°C with a horizontal/vertical configuration. It can also be configured for up to six-zone temperature control, allowing users to create complex temperature gradients for various annealing processes. Additionally, the furnace provides a wide range of capabilities for doping, such as ammonia-atom doping, film evaporation, and solid-state diffusion. The TE 30X also features a variety of integrated automation features that maximize the functionality of the system. The FORSUS and FILTEC automation systems provide nearly automated operation, allowing users to control processes and plan the behavior of the furnace. The unit also provides for effective thermal management while allowing users to save energy and increase production efficiency. The TE TEL / TOKYO ELECTRON 30X also includes additional accessories to improve usability in thermal processes. These accessories include a variety of quartz-ware products, such as mesh boats, quartz tubes, and quartz cups, as well as special and high-temperature crucibles. Additionally, the TE TEL 30X features an advanced grounding machine, which ensures operator safety during high-temperature processes. Overall, the TE TOKYO ELECTRON 30X is a powerful tool that provides quick and accurate thermal processing capabilities for a variety of applications. It is equipped with multiple sources, automated systems, and additional accessories that maximize performance while minimizing complexity. The TE 30X diffusion furnace provides advanced features and reliable performance that make it a valuable addition in the lab.
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