Used TEL / TOKYO ELECTRON A303i #293801900 for sale

TEL / TOKYO ELECTRON A303i is a diffusion furnace and accessories that is designed to meet the needs of today's integrated circuit (IC) fabrication processes. It provides high-quality deposition at extremely low temperatures with superb uniformity. TEL A303i features a superbly designed, low thermal mass (LTM) design that allows for reduced thermal cycling time. The diffusion process is controlled via a computerized process controller that directs and monitors all functions of the process, from temperature settings to process recipes. The specialized TOKYO ELECTRON A 303 I diffuser crucible is constructed with a low thermal mass design in order to maximize thermal uniformity across the substrate. The crucible allows temperatures up to 1090 degrees Celsius, along with a maximum pressure of up to 80 Torr. In addition, the crucible features a pair of horizontally opposed quartz lamps that enable the Pulsed Nitrogen Load (PNL) transfer system. The PNL ensures accurate positioning of the reaction chamber to prevent reaction interference. Additionally, TEL A 303 I is equipped with a wide array of accessories that makes sure optimal process control and performance. These include the LoadLOCK port isolation module, which provides a safe, reliable way to load substrates into the reaction chamber without worrying about rotating the chamber. The introduction of impurity gases and other reactive gases is handled by the Atomic Layer Delivery (ALD) system, which can be programmed to deliver precisely controlled atomic layers of gas for deposition processes. To monitor process parameters in real time, A 303 I comes with an advanced Data Acquisition Systems (DAS) controller, which enables reliable, real-time feedback and recording of up to 16 parameters. This includes air pressure, substrate temperature, chamber temperature, and other hidden parameters. TOKYO ELECTRON A303i's proprietary In Vacuum Ultra-Fine Control (IVAP) experience provides the ultimate in precision and accuracy when setting up processes. With up to six parameters that can be set, the IVAP allows users to monitor and adjust their process in real-time. In conclusion, A303i is a state-of-the art diffusion furnace and accessories that offer unparalleled precision and accuracy. With its low thermal mass design, PNL transfer system, and precise control systems, it is the perfect tool for IC fab labs looking for superior performance.