Used TEL / TOKYO ELECTRON A303i #293801901 for sale

ID: 293801901
Vintage: 2007
Vertical diffusion furnace 2007 vintage.
TEL / TOKYO ELECTRON A303i is a diffusion furnace and accessory designed to facilitate efficient processing of semiconductor wafers. It features a high-temperature large-area processing chamber, capable of temperatures up to 1150°C. The chamber is designed with a focus on uniform temperature distribution, allowing for accurate and efficient processing of multiple wafers at one time. It is equipped with an advanced digital control equipment and user-friendly operator interface for easy set-up and operation. The vacuum system provides minimal pressure gradients and enables longer process times with less thermal degradation of wafers. It is designed with advanced features such as pressure control, temperature stabilization and remote access. The chiller is built-in to minimize coolant loss and prevent overheating during the diffusion process. TEL A303i also includes comprehensive processes monitoring capabilities, such as gas flow and temperature profiles, which can be used to maintain optimal conditions for complete and accurate diffusion results. Additionally, the unit is equipped with a Graphite susceptor for reliable repeatable process results. It also supports up to four process modules and a maximum process temperature of 1150°C. In terms of safety, TOKYO ELECTRON A 303 I is fully certified to meet UL standards and UL 508C requirements. It is equipped with an interlock machine and over-temperature protection mechanism to ensure operator safety. The tool is designed for minimal maintenance, and all components can be removed and reassembled with minimal effort. It is also equipped with power surge protection to prevent damage in the event of a power outage. Overall, A303i is a reliable and feature-rich diffusion furnace and accessorie designed for the efficient and accurate processing of semiconductor wafers. It is loaded with advanced features such as gas flow and temperature profiles, pressure control, temperature stabilization, remote access, and power surge protection for optimal and repeatable process results. It is also UL certified and equipped with advanced safety features, making it a cost-effective solution for demanding semiconductor manufacturing.
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