Used TEL / TOKYO ELECTRON A303i #293801902 for sale

ID: 293801902
Vintage: 2006
Vertical diffusion furnace 2006 vintage.
TEL / TOKYO ELECTRON A303i is a state-of-the-art diffusion furnace and accessory for high-precision applications such as advanced microelectronic device fabrication. This series of production-grade equipment from TEL (TOKYO ELECTRON) is ideal for use in laboratories and production lines, as well as research and development (R&D) efforts. TEL A303i diffusion furnace provides clean operation and uniformity in temperatures up to 1,250°C. It is equipped with a quartz bell-type heater for uniform heat distribution, sealing type process chamber for improved uniformity, and adjustable inner chamber pressure. TOKYO ELECTRON A 303 I also offers an extended range of filtration systems that allow for better protection against contamination. The furnace is also equipped with a Powerful Purge Equipment, an Automatic Atmosphere sampler, and a Vision Lens Viewer. The atmosphere sampler detects impurities in the reaction chamber, allowing for adjustments to the purge cycle based on current conditions. Additionally, the Vision Lens Viewer provides operator-friendly visibility of the substrate during processing. Additionally, A303i diffusion furnace is designed to optimize user productivity and efficiency. It incorporates a Robotized Load Lock System and Smart Tool Integration, which allow for fast, accurate wafer handling and preparatory steps such as degassing and dipping. It also includes an Automatic Temperature Monitor that quickly detects thermal instability and adjusts the heat source, ensuring smooth and accurate operation. Furthermore, TOKYO ELECTRON A303i provides an array of safety measures for optimum situation control. Its elaborate three-stage safety unit automatically monitors and adjusts operations to ensure safety. It has automatic shut-off and recover functions in case of abnormal operation, as well as pressure relief valves with an auto-reset feature. It also features fire retardant, temperature-resistant insulation material for improved stability and temperature precision. Overall, A 303 I is an advanced diffusion furnace that comes with a comprehensive set of features to deliver superior performance. Its advanced purge machine, expansive filtration systems, and integrated safety systems allow users to operate with greater confidence and peace of mind. Furthermore, its robotized load lock, automatic temperature monitor, and vision lens viewer provide a powerful and efficient user experience.
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