Used TEL / TOKYO ELECTRON A303i #293807098 for sale
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TEL / TOKYO ELECTRON A303i is a diffusion furnace and its associated accessories used in the fabrication of semiconductor devices. It is specifically designed to provide clean, uniform diffusion processes in a reliable and repeatable manner. TEL A303i can heat wafers up to temperatures of 1150˚C and is capable of processing wafer sizes up to diameter of 8 inches. TOKYO ELECTRON A 303 I utilizes an integrated monocrystalline graphite heat zone and eutectic liquid alloy technology which provides excellent homogeneous temperature distribution within the heat zone. The unique "super-speed" disk rotation equipment ensures a uniform temperature within the chamber and reduces graphite erosion. It also has an integrated "pulse" gas delivery system which can be used for accurate gas flow control. The unit also features an on-board vacuum machine for increased process accuracy and enhanced reproducibility. The diffusion furnace is equipped with an advanced computer interface which allows for precise control of process variables. This computer interface includes process monitoring and data logging capabilities, enabling the user to easily track the progress of each processing step. The tool also provides real-time feedback through the use of advanced sensors and thermocouples. For enhanced safety, TEL A 303 I is also equipped with an Emergency Stop Button, Overheat Protection Asset and Emergency Check Valves. Together, these features ensure that the model is automatically shut down in the event of an emergency. In addition to these features, A 303 I is also outfitted with a number of useful accessories. These include an additional graphite heat zone, a loading station, and a quench station. These accessories offer an enhanced range of options for the processing of silicon-on-insulator (MOI) wafers, as well as wafer testing and analysis. The combination of advanced features and accessories offered by TOKYO ELECTRON A303i makes it an ideal choice for a range of semiconductor fabrication processes, such as the automated integration of optical sensors and single-cell transistors for IC package products. It is an essential tool for reliable and repeatable production of Photodiodes, CCDs, and other ICs.
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