Used TEL / TOKYO ELECTRON A303i #9235204 for sale
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ID: 9235204
Wafer Size: 12"
Vintage: 2006
Vertical diffusion furnace, 12"
2006 vintage.
TEL / TOKYO ELECTRON A303i is a diffusion furnace and a series of accessories made to fulfill precise temperature requirements for the manufacture of semiconductor wafers and other devices. This diffusion furnace is specially built to handle temperatures up to 1350°C, making it perfect for high temperature depositions. TEL A303i is composed of several parts including the chamber body, quartz tube assembly, electrical supplies, a power source, and control systems. The chamber body of TOKYO ELECTRON A 303 I is made from aluminum with a special resin coating that can withstand the extreme temperatures applied to its interior. The quartz tube assembly consists of a quartz tube, liner, quartz tube attachment, seal ring, and a shut off valve. It connects the chamber body and the furnace entrance. The electrical supplies consist of a programable power source, control box, and power control unit, which together provide the regulation to maintain precise temperature and pressure requirements. The internal construction of A303i has an insulation layer of ceramic and insulation boards which helps to withstand higher temperatures efficiently. The insulation boards also protect against the ingress of dust and debris, keeping the chamber clean and safe for use. Other temperature controlling features inside the chamber include the quartz tube assembly, heater, and a cooling system which uses gas jets to cool the quartz tube. TEL / TOKYO ELECTRON A 303 I also has several optional features including automatic loading and unloading systems, diffused gas sensing systems and precise valve control for exact atmosphere and pressure regulation. Furthermore, TEL A 303 I comes with advanced monitoring and recording systems that allow for precise tracking of the entire process. TOKYO ELECTRON A303i is an excellent choice for industries who require precise temperature and temperature uniformity for their processes. It combines reliable temperature regulation with high-end safety features and process control systems, making it a reliable and economical choice for many applications.
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