Used TEL / TOKYO ELECTRON A303i #9241289 for sale
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ID: 9241289
Wafer Size: 12"
Vintage: 2004
Vertical diffusion furnaces, 12"
2004 vintage.
TEL / TOKYO ELECTRON A303i Diffusion Furnace is a powerful piece of laboratory equipment used to deposit onto the surface of a substrate or other material, a thin layer of material. It is well suited for applications which require precise temperature control such as in the production of compound semiconductors, or for the production of other devices using various materials including diamond films. TEL A303i is a horizontal furnace with a single process tube that is housed in a titanium enclosure. It is water chill cycle cooled, and contains a quartz sealed resistive heating element. The maximum operating temperature is 1300°C with a temperature uniformity of ±5°C. The exterior panels are made from 304 and 321 stainless steel. The chamber is also constructed from stainless steel with an inner quartz tube and glass wool insulation. The furnace is equipped with an exhaust port that is designed to evacuate the heated air generated during process runs. TOKYO ELECTRON A 303 I comes with several accessories, including an automated gas box, vacuum separation, a ventilator, a power supply, a safety valve, a support mechanism, a water cooling inlet, an exhaust port, and a controller. The gas box is designed to mix and control the amount of gas used in the process runs. The vacuum separation system is used to separate the exhaust air from the furnace chamber. It allows for the efficient removal of contaminates from the air being emitted from the furnace. The ventilator is used to regulate the temperature of the furnace. The safety valve is used to prevent any over-pressurization within the system and to act as a safety precaution should the temperature rise beyond the desired level. The power supply allows for a precise control of the temperature, while the support mechanism ensures that the furnace is stable during the process runs. The water cooling inlet is connected to a chilled water supply and is used to maintain a consistent temperature throughout the process. The exhaust port is connected to the vacuum system and is designed to remove heated or contaminated air from the furnace chamber, thus preventing any undesired substances from entering the enclosure during the process. The controller is used to monitor and adjust the temperature and overall process runs. In conclusion, TEL A 303 I diffusion furnace and its accompanying accessories provides a reliable and efficient way to deposit thin layers of material. It offers a precision temperature control and perfect uniformity, while also adhering to all safety requirements.
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