Used TEL / TOKYO ELECTRON A303i #9241298 for sale
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ID: 9241298
Wafer Size: 12"
Vintage: 2003
Vertical diffusion furnaces, 12"
2003 vintage.
TEL / TOKYO ELECTRON A303i is a high quality diffusion furnace used for thermal processing of semiconductors. It is a versatile tool that can be used for annealing, drive in and other diffusions as well as for reflow and high density packaging. The main features of TEL A303i are its advanced chamber design, uniform temperature distribution, and high throughput. The chamber design is resistant to erosion and cracks that are common with other similar models. This makes the furnace incredibly reliable, and conducive to repeatable high quality results. The uniform temperature distribution makes it possible to process wafers quickly with minimal thermal gradient. The high throughput also allows for greater production speed and efficiency. The furnace comes with a Molybdenum heating element which is adjustable and will heat up in a short amount of time. The heating element is protected from corrosion due to its refractory properties. It also comes equipped with an Argon purging equipment and utilizes a chemical vapor deposition process. The use of this chemical vapor deposition process with argon prevents the chamber from experiencing contamination from thermal oxidation, leading to an environment that is conducive for superior results. TOKYO ELECTRON A 303 I also includes multiple safety features such as a safety door, alarm system, ZnO temperature indicator, and a vacuum unit. The safety door prevents the operator from opening the chamber if the temperature is too high, while the alarm machine will notify the operator of any abnormal conditions. The ZnO temperature indicator alerts the user when the temperature inside the chamber exceeds a certain limit, and the vacuum tool prevents any possible contaminants from entering the asset. In addition to safety, A303i also provides a great user experience. The user can easily access the necessary data for the thermal processing through the intuitive interface. The interface also allows the user to customize the settings such as temperature control and recipe programming. TEL / TOKYO ELECTRON A 303 I is a versatile and reliable diffusion furnace for thermal processing of semiconductors. Its advanced chamber design, uniform temperature distribution, high throughput, and user-friendly interface makes it a great choice for companies looking for a reliable and dependable product. It provides the necessary features and safety measures that ensure superior quality results, while its intuitive interface provides a smooth and simplified experience.
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