Used TEL / TOKYO ELECTRON A303i #9242096 for sale
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ID: 9242096
Wafer Size: 12"
Vintage: 2005
Vertical diffusion furnaces, 12"
2005 vintage.
TEL / TOKYO ELECTRON A303i is a vertical type, orbital-mass assisted vertical-flow, single wafer, diffusion furnace and accessory for demanding products. The device features a distinctively shaped, horizontal electric heater configuration that offers precise local heating and cooling characteristics. It is designed to provide low-temperature annealing with high-temperature diffusion. TEL A303i offers an attractive performance profile for the demanding applications of semiconductor device fabrication. The reliable vertical-flow annealing capabilities of the device are highly suited for precision patterning layers required for device fabrication. The device also provides wide process window for temperature control. Its thermal uniformity control accuracy is capable of being precisely monitored and adjusted across the entire process of heating and cooling. TOKYO ELECTRON A 303 I includes components like a large, highly spectrally-graded, dual-shell quartz tube, a magnetically-levitated motor, and a nitride walled graphite liner which ensures even heat distribution. It has a low-profile design that ensures safe access. The unique characteristic of TOKYO ELECTRON A303i is that it provides both diffusion and annealing capabilities within the same device. The device includes a monitor, a controller, and a software package for temperature and process control. The monitor can call up the data and graph the performance of each process on the LCD screen. The controller optically accesses input parameters and operating conditions of the primary AC generator and the thermal furnace. The controller is also used to monitor the thermal annealing process and supplying parameters for suitably optimized results. TEL A 303 I includes a hi-tech, operational and safety guidelines which help optimize operations. The device has a definite edge in providing uniform heating and cooling performance at any desired temperatures in order to ensure consistent products. The user also has access to tips & tricks and checklists within the user manual. The device is certified to meet stringent safety guidelines and is highly regarded as one of the most reliable and efficient diffusion furnaces available.
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