Used TEL / TOKYO ELECTRON A303i #9242097 for sale
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ID: 9242097
Wafer Size: 12"
Vintage: 2004
Vertical diffusion furnace, 12"
2004 vintage.
TEL / TOKYO ELECTRON A303i is a diffusion furnace and its accessories that are used in semiconductor fabrication. This equipment is designed to provide superior diffusion results in a small area. The versatile, user-friendly configuration allows for quick and easy setup. TEL A303i is comprised of nine components, including a plate heater, gas supply, gas controller and a main unit. The main unit is made of a chassis and two heaters. It is driven by a temperature control unit and allows for accurate temperature control in two zones. The plate heater provides uniform heat distribution and is suitable for high-temperature diffusion. The gas supply system provides high-temperature process gases and includes the necessary connections and components. The gas controller is integrated with the main unit and allows users to adjust the flow rate and pressure of the process gases, as well as monitor the diffusion process levels. TOKYO ELECTRON A 303 I is designed to accommodate a wide range of wafer sizes, ranging from 25mm to 200mm in diameter. The unit is also designed to integrate with other systems and it features a dedicated interface for control systems and measured data. TEL A 303 I is equipped with a Graphical User Interface (GUI) to make controlling and monitoring the machine easy. TOKYO ELECTRON A303i is designed to be highly reliable. With safety mechanisms such as cooling systems, over-temperature controllers and an advanced safety monitoring tool, users can be assured that the asset will perform reliably and safely. In conclusion, TEL / TOKYO ELECTRON A 303 I is a reliable and versatile diffusion furnace with a wide range of features and components to ensure accurate diffusion in a short amount of time. With its superior performance, reliable operation and well-designed configuration, A303i is a great choice for any semiconductor fabrication.
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