Used TEL / TOKYO ELECTRON A303i #9271021 for sale
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ID: 9271021
Wafer Size: 12"
Vintage: 2003
Vertical diffusion furnace, 12"
2003 vintage.
TEL / TOKYO ELECTRON A303i is a diffusion furnace and accessories designed for semi-conductor production. This particular diffusion furnaces is equipped with advanced technologies such as a fully automated atmospheric level, temperature, output, and intensity controllers and adjustable evaporation sources to create an extremely uniform thermal environment. Additionally, TEL A303i allows for the simultaneous thermal oxidation, annealing, and diffusion of different substrates during the production process. TOKYO ELECTRON A 303 I has a high temperature capability enabled by its quartz tube furnace chamber, capable of reaching temperatures of up to up to 1100°C (2012°F). The furnace uses TEL unique, energy-saving radiant heating technology which is both highly efficient and helps to reduce greenhouse gas emissions. It is also equipped with a temperature stabilizer equipment, which maintains process stability over a long production period. Additionally, it is equipped with wafer holder placement sensors which work in conjunction with the exhaust system to ensure that the temperature of the chamber remains uniform. TEL A 303 I's advanced features also allow it to accurately control gas flow and mixture. In addition to controlling the gas flow and mixture, the furnace is equipped with various interface ports for external measurement of pressure, flow, and temperature. These ports also enable the integration of a wide array of other devices such as PCs for logging production data. TEL / TOKYO ELECTRON A 303 I has passed numerous safety and ergonomic tests, to ensure that the device is user-friendly even under prolonged operation. In addition, the every process involved in the operation of A 303 I is double-checked and monitored by a highly precise self-sensing unit. Depending on the purpose of use, A303i has an array of optional parts that enable users to customize the device to best suit their needs. The components that can be switched out include the quartz vessel, excitation machine components, an exhaust tool, a cooling fan, and the remote monitor and controller. These features make TOKYO ELECTRON A303i the most advanced diffusion furnace available on the market. It provides users with the most precise, uniform conditions needed for optimal semi-conductor production.
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