Used TEL / TOKYO ELECTRON A303i #9271255 for sale

TEL / TOKYO ELECTRON A303i is a diffusion furnace and its accompanying accessories, developed to improve semiconductor product processing. This diffused furnace features a max temperature of 1300 ℃ and is designed for high-rate thermal processes such as oxidation and diffusion. The furnace is equipped with sensors that can detect abnormal temperature states, allowing for precise control of the internal temperature. It also features a standard wafer cassette outlet, as well as a cassette loading and unloading equipment for convenient wafer manipulation. Moreover, the furnace boasts an automatic cassette load system that can handle small amount of wafers. The unit increases wafer to wafer uniformity by moving wafers faster and shorten the time taken for heating and cooling. The furnace interior is made of quartz glass, allowing for a more efficient charging and discharging of wafers due to the enhanced transparency. The chamber is also equipped with an LED lighting machine, making for a smooth process of searching for items among various places within the furnace. TEL A303i is highly adaptable and can be applied to various types of heat treatment (annealing, oxidation, etc.), and is capable to process high-volume production as well. This furnace is designed for ultimate stability and reliability, with an auto restart mechanism that can get the tool running again in the event of a power failure, and an optional internal Gas Injection Asset (GIS) that can be used to introduce inert gases as necessary. TOKYO ELECTRON A 303 I is an important part of any semiconductor product processing, providing a consistent, reliable, and safe heat processing solution. With its various features, from sensors to auto restart mechanisms, A 303 I is an ideal choice for any process engineer.