Used TEL / TOKYO ELECTRON A303i #9311324 for sale

TEL / TOKYO ELECTRON A303i
ID: 9311324
Wafer Size: 12"
Vintage: 2003
Vertical diffusion furnace, 12" 2003 vintage.
The TEKTEL / TOKYO ELECTRON A303i is a diffusion furnace equipment designed for high-precision thermally-assisted processes relying on a combination of thermo-controlled environment and advanced material handling. The diffusion furnace itself consists of two compartments, a heat zone inside and a gas zone outside. The heat zone is kept at a uniform temperature and the gas zone is isolated for safety purposes. The outer case of the furnace is constructed from high grade stainless steel and can be insulated with combustible insulation materials. Temperature control is achieved through a combination of forced air and radiant heaters. Additionally, an electric thermal conduction chamber can be attached for small-scale operations. The system offers various accessories for enhanced performance and functionality. The gas management unit controls the rate at which the gas is fed into the furnace, allowing for precise control of flow and quantity. The material handling machine provides precise material transfer to and from the treatment chamber. Adjustable feeders feed the material from the feed belt to the treatment. For complex loading requirements, several stackers and automated conveyors can be combined to form a flexible material handling unit. Data logging and analysis in the furnace is accomplished via a variety of temperature sensors. The tool is equipped with a graphic user interface that is capable of displaying detailed process data. The data is logged and displayed in the form of real-time charts and graphs. The entire asset can be remotely monitored and controlled via an Ethernet port. Furthermore, the model features a pretreatment and posttreatment station that allows for quality control of the material prior to and after the treatment processes. Post treatment functions include etching, inspection, and storage of samples. The equipment is designed to minimize downtime, allowing for quick and efficient material handling. The TEKTEL A303i is an environmentally-friendly, reliable, and cost-effective solution for precision thermal processes. It provides tools that accomplish superior precision, quality control, and performance in many advanced material treatments.
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