Used TEL / TOKYO ELECTRON A303i #9314617 for sale
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ID: 9314617
Wafer Size: 12"
Vintage: 2003
Vertical diffusion furnace, 12"
2003 vintage.
TEL / TOKYO ELECTRON A303i is a diffusion furnace and accessory that is widely used in the semiconductor industry. This diffusion furnace is a high-performance furnace that is designed to meet the needs of semiconductor device fabrication and can be used for applications such as doping, oxidation, deposition, and thermal semiconductor device processing. TEL A303i features a robust construction, a stainless steel liner, a precisely controlled temperature range from 200°C to 1050°C, and a 3-zone independent hot zone control capability. The equipped mirror-surface quartz tube ensures a uniform tempering of the wafer surfaces. The quick and stable operations are enabled by the hot zone configuration, temperature control, and gas distribution system. The multiple functions allow the user to select ideal processing conditions for each application. The high-speed data acquisition system monitors and records the process conditions, and a remote access option allows users to monitor the process conditions from any location. Additionally, the software allows for the display and printing of process data, which can aid in troubleshooting and process optimization. TOKYO ELECTRON A 303 I's long-term stability and maintenance-friendly design ensure effective long-term operation. The maintenance is easy and fast, thus making it a reliable diffusion furnace and accessory.
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