Used TEL / TOKYO ELECTRON A303i #9351448 for sale
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ID: 9351448
Wafer Size: 12"
Vintage: 2006
Vertical diffusion furnace,12"
2006 vintage.
TEL / TOKYO ELECTRON A303i diffusion furnace is an advanced piece of equipment designed to enable the diffusion of materials and components onto substrates and other objects. This advanced equipment features a number of programmable and customizable options for managing large-scale projects. It also features a number of accessories that enable added functionality. TEL A303i is a three-chamber vertical-until design with side-wall and top-wall furnace elements. This combination allows for up to six substrate holders to be used in the process. The system is ideal for use in producing large-scale components and materials, as it is capable of diffusion of various materials like silicon, aluminum, and metals. The unit's power supply features a winding section with six windings and a transformer section with digital-to-analog (D/A) conversion. This allows for precise control of power output and temperature regulation. The machine also offers multiple diffusion operations: single-pass, multi-pass, multi-recirculation, and double-pass. The tool's automated functions also allow for accurate control over the velocity and temperature of the diffusion, as well as precise control over the thermal process. The asset offers a precise control range that can be set up by adjusting the step count for each rise in temperature. Additionally, an additional adjuster allows the user to set a maximum time limit for the thermal cycle. Once the diffusion process is complete, TOKYO ELECTRON A 303 I's multiple cooling options allow for quick, efficient cooling of the substrate and material. This includes active cooling by fan and through an external recirculation circuit. An optional cassette handler assembly is also available, enabling easy transfer of the substrates between chambers. TOKYO ELECTRON A303i diffusion furnace and accessories quickly and accurately diffuses large-scale components and materials. Its multiple programmable options and automated functions make it an efficient and versatile tool for diffusion processes, while its robust design ensures reliable results each time.
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