Used TEL / TOKYO ELECTRON A303i #9358606 for sale
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ID: 9358606
Wafer Size: 12"
Vintage: 2007
Vertical diffusion furnace, 12"
2007 vintage.
TEL / TOKYO ELECTRON A303i is an advanced diffusion furnace and accessory used for a variety of thermal processing applications. It provides high accuracy temperature control with a uniform temperature range of 900°C from the top to 600°C from the bottom of the furnace. It also offers enhanced analytic functions, improved reliability, and thermal uniformity, and a rapid response time. TEL A303i is capable of carrying out thermal oxidation up to 900°C, advanced thermal diffusion, and can be used for annealing and epitaxial growth. The furnace utilizes a high-quality forced-air cooling technology that ensures optimized temperature distribution throughout the entire chamber for uniform heat dissipation. The air temperature can be set to different values across the chamber either in stepwise or in a continuous manner. This creates precise and uniform temperature conditions for the required process and results in excellent process quality. TOKYO ELECTRON A 303 I is equipped with a generator and two mufflers. The generator releases detailed process information in real-time, allowing for reliable control of the oxidation process. Furthermore, the generator has two types of on-board sensors and monitors that measure the flow rate of the air as well as the temperature of the heating elements. This ensures accurate temperature control and greatly enhances the accuracy of the furnace. TOKYO ELECTRON A303i also comes with an optional automatic wafer transport equipment, which allows up to 24 wafers to be processed simultaneously. The system is designed to provide optimal and uniform results by controlling the trajectory and rotation of each wafer during time-controlled operations. This ensures reproducible results and further optimizes the process. Furthermore, A 303 I also offers high data security with the integrated password-protected Power On unit, which prevents unsanctioned use of the machine by unauthorized personnel. The furnace also ensures uninterrupted operation with low energy consumption, and is designed to minimize the total operating cost. In conclusion, TEL / TOKYO ELECTRON A 303 I is an advanced diffusion furnace and accessory that provides high accuracy temperature control, enhanced analytical functions, reliable operation, thermal uniformity, and a rapid response time. It is suitable for a wide range of thermal processing applications and offers cost savings in terms of energy consumption.
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