Used TEL / TOKYO ELECTRON Alpha 303C #9097223 for sale

TEL / TOKYO ELECTRON Alpha 303C is an advanced diffusion furnace manufactured by TEL (TOKYO ELECTRON), a global leader in semiconductor fabrication equipment. TEL Alpha 303C has a unique design that makes it an ideal choice for chip manufacturers who require precise control over critical process steps. The furnace consists of a dual-zone 0.7 cubic-foot heated chamber with a high-temperature limit of 1250°C. An optional plasma oxidation stage is available to reduce ESD-related process steps. TOKYO ELECTRON Alpha 303C includes several features that support accuracy and repeatability in a wide range of process steps. It contains built-in process controllers that enable the user to set up and execute efficient preprogrammed recipes without manual intervention. Additionally, a high-speed mass flow controller and an integrated particle contamination monitoring system provide excellent control over gas handling and chamber cleanliness. Alpha 303C is rated for a maximum pressure of 100 mbar and has a fast sequencing (FS) ramp rate of 150°C/minute, making it suitable for a variety of materials processes including rapid thermal annealing or transistors activation. It also features advanced front-side safety features, such as pressure interlocks and an ionizer, to reduce the risk of contamination and damage to vulnerable process components. TEL / TOKYO ELECTRON Alpha 303C is compatible with several TEL / TOKYO ELECTRON accessories, including the configurable sample handling unit (SHU-3000) and wafer transfer systems such as TEL-ATS Series 0 and 1. This allows users to customize their configuration to their specific application. TEL Alpha 303C is an excellent example of TOKYO ELECTRON commitment to innovation and quality. It is designed to provide optimized process efficiency and accuracy, while maintaining safe operation through sound process control principles and the inclusion of front-side safety features. As such, it is an excellent choice for chip manufacturers looking for a reliable and precise diffusion furnace.