Used TEL / TOKYO ELECTRON Alpha 303i-H #9097229 for sale

TEL / TOKYO ELECTRON Alpha 303i-H is an advanced diffusion furnace specifically designed to evenly distribute heat into a variety of materials. It is a high-temperature, single-wafer diffusion furnace and is designed to maximize process uniformity and repeatability. TEL Alpha 303i-H features a precision vertical profile with highly efficient diffusion chamber heating, a mechanically robust and thermally reliable heating system, and an automatic sub-atmospheric gas panel. Its vertically-mounted precision furnace and high efficiency diffusion chamber ensures reliable temperature uniformity by rapidly heating and cooling the wafer surface using both multiple gas flow and convection. The furnace is also equipped with automated high-performance gas-mixing and sub-atmospheric gas-control systems. This diffusion furnace features high-speed heating and cooling, a linear reaction chamber for uniform and consistent temperature profiles, computer-controlled operation, and intuitive touchscreen user interface. Its high-efficiency heating capacity and precise temperature control allows for the processing of a wide variety of materials such as metal, polysilicon, and other materials for plasma deposition, etching and implantation. Additional features include high temperature programmable profile functions, rapid sample rate up to 50°C/min, and 0.2°C temperature uniformity. TOKYO ELECTRON Alpha 303i-H comes with a range of advanced safety mechanisms such as an emergency shut-off switch, an exhaust system, and an alarm system. It is also highly configurable so that its settings can be amended easily and quickly for a variety of different processes, allowing for improved cycle time and cost savings. Overall, Alpha 303i-H is an advanced diffusion furnace which offers efficient and consistent thermal processing with high-temperature performance, providing a reliable and cost-effective solution to a variety of heat-processing needs.