Used TEL / TOKYO ELECTRON Alpha 303i-H #9097240 for sale

TEL / TOKYO ELECTRON Alpha 303i-H is a high-performance vertical diffusion furnace and accessorie equipment designed for ultra-high purity (UHP) semiconductor device processing. The system features superior process capability and temperature uniformity, with a temperature range from room temperature to 1000°C. Additionally, the unit can accommodate wafers up to 8 in. for ultra-low-resistivity processing. The machine features Carrier Flow™ technology that provides precise temperature uniformity control. This technology provides an improved control of the temperature rate uniformity that has enabled wafer processing with superior device yields. The tool also includes Glide Elements™ technology which offers precise control of the gas flow rate, a uniform sheath wall, and gentle containment of the heated wafers. This helps to prevent the lateral displacement of the wafers and ensures uniform heating of the wafer surfaces. The asset also includes a unique heating element and temperature sensor configuration, allowing precise control of heater power and temperature. Additionally, the model includes a patented temperature compensation equipment that prevents sudden changes in temperature. This helps to ensure optimum temperature uniformity over both time as well as across the wafer surface. TEL Alpha 303i-H also features an inert atmosphere, making it suitable for a range of process operations. To ensure ultra-high purity operations, the system is equipped with both pre- and post-processing bakeout, as well as a patented rapid thermal annealing solution. This helps to ensure high device yield and robust process operations. The unit also includes a safety unit that helps to provide an adequate level of protection from harm to personnel and equipment. The safety unit combines both mechanical and electrical protection, and includes an interlock machine and other safety approvals. Additionally, the safety unit also includes a series of LED indicators that further enhance the safety of personnel and equipment. Overall, TOKYO ELECTRON Alpha 303i-H is an advanced diffusion furnace and accessorie tool that provides superior process capability, temperature uniformity and wafer processing yields. This asset is designed for UHP device processing, and features both Carrier Flow™ technology and Glide Elements™ technology, as well as a patented temperature compensation model and safety unit, making it ideal for reliable and cost-effective semiconductor device manufacturing.