Used TEL / TOKYO ELECTRON Alpha 303i-H #9377244 for sale
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ID: 9377244
Wafer Size: 12"
Vintage: 2002
Vertical anneal furnace, 12"
H2 Anneal
2002 vintage.
TEL / TOKYO ELECTRON Alpha 303i-H Diffusion Furnace is a state-of-the-art thermal processing tool which provides a high level of efficient and reliable diffusion for electronics devices. TEL Alpha 303i-H is designed to meet the highest industry standards including; high performance, reliable cycle time optimization, versatile real-time control possible and reduced power, time and costs. TOKYO ELECTRON Alpha 303i-H Diffusion Furnace is an optimal choice for the most demanding device manufacturing applications. Alpha 303i-H features an exclusive and elegant wide-profile design providing peak throughput improvements and reduced cycle-time. It incorporates the latest servo-electronic technology and advanced software control enabling rapid and highly precise thermal processing of both bulk wafer and edge frames with unmatched uniformity and cycle time control. TEL / TOKYO ELECTRON Alpha 303i-H achieves excellent temperature uniformity of ±3°C, with rapid and uniform heating from zero to a maximum temperature of ~1100°C with its large stainless steel heater block. Other features of TEL Alpha 303i-H include; an ergonomic chamber interior with easy access to the heater block, a high temperature fan-less forced convection system for superior uniformity, an adjustable power control that allows temperature ramping with speed/temperature control, a low pressure system design with ultra-high pressure capability and adjustable flow rates. TOKYO ELECTRON Alpha 303i-H also offers a range of accessories to enhance its performance, including; an advanced fully programmable controller with touch screen for user-friendly operation, a manually operated disk-type wafer holder securely accommodating up to 10 wafers, a variety of removable cassette-type wafer holders capable of accommodating up to 25 wafers, a stainless steel mesh screen that provides improved sample uniformity, a large flexibly mounted vacuum pump, and passivation/etch gas systems and boxes. Alpha 303i-H Diffusion Furnace is the ideal system for high-end diffusion applications, providing the user with top-of-the-line uniformity, reliability and performance. With superior temperature uniformity, excellent temperature responsiveness, and powerful and versatile tools, TEL / TOKYO ELECTRON Alpha 303i-H is the essential tool for advanced device manufacturing.
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