Used TEL / TOKYO ELECTRON Alpha 303i-K #293606616 for sale

TEL / TOKYO ELECTRON Alpha 303i-K is a diffusion furnace used in the semiconductor manufacturing process and is one of the most advanced and reliable on the market. TEL ALPHA 303IK is a low-temperature, high-performance diffusion furnace that provides maximum accuracy, particularly for thin film applications. This model offers up to five programmable segments for multi-step diffusion processes and is capable of making reproducible oxide thicknesses at high accuracy and excellent uniformity. TOKYO ELECTRON ALPHA 303 I K diffusion furnace uses nitrogen gas for purging and is constructed with a floating boat geometry. The upper and lower boats can be independent, therefore allowing different processing temperatures for different areas. The furnace also includes a sophisticated control board with digital temperature control and metrology to monitor the process. An array of heating elements placed in the back, sides and bottom of the furnace facilitate precise temperature control and uniformity. TOKYO ELECTRON ALPHA 303IK is designed with several features to improves safety and accuracy, including an exothermic oxidation chamber to minimize the risk of an explosion and reduce the deposition rate of oxidizing species. The diffusion boat profile is double sealed, with a gas box to protect the process from contamination. The boat is also supported with suspension springs or wedges to stabilize the boat and lessen the thermal stress. Additionally, the furnace includes a quartz-shielded heater zone, a ceramic-shielded post-heat zone, and an inert buffer zone to further improve the process accuracy. TEL / TOKYO ELECTRON ALPHA 303 I K comes with a full suite of optional accessories including, but not limited to, thermal oxidation wet benches, ozone-free dry etch systems, and metal CVD. The main features offer excellent repeatability and reproducibility, allowing for high production yields. This diffusion furnace also offers a high throughput and is compatible with chambers up to 6.5" x 5.75". All TEL products are built with robust quality control systems to ensure reliable performance. This includes advanced process control and a dedicated customer service team who are available to provide expert advice and assistance. TEL ALPHA 303 I K includes a 24-month warranty, covering parts and labor for up to 24 months, for unprecedented peace of mind.