Used TEL / TOKYO ELECTRON Alpha 303i-K #293606617 for sale

TEL / TOKYO ELECTRON Alpha 303i-K is a comprehensive diffusion furnace and accessory designed for the thermal processing of wafers and devices. This fully automated equipment is ideal for use in silicon-on-insulator (SOI), compound semiconductor and MEMS device manufacture. It offers high production throughput, easy integration with existing fabrication tools, and outstanding device quality. The 303i-K features a range of advanced process capabilities, including rapid thermal processing (RTP), oxide reflow, gold/metal reflow and hyperthermal SiO2 deposition. Its powerful autocontrol system also provides high precision temperature control, enabling accurate profile repeatability and accuracy during multiple processing runs. The machine is equipped with a unique cooling unit that reduces edge dielectric loss and warpage caused by thermally-induced stress. The machine operates by cooling the top and rear surfaces of the wafers or devices, while the sides remain heated according to the desired process profile. This ensures highly efficient thermal diffusion, while limiting any damage caused by uneven or excessive heating. Additionally, the 303i-K includes a range of advanced safety features, including a protective shield and a highly reliable emergency stop tool. It has recently been certified by an independent lab for RoHS compliance, which enables its use in many countries around the world. The machine also offers remote monitoring and maintenance capabilities, providing users with access to real-time product performance data. Finally, the 303i-K features flexible operation modes, enabling the user to tailor the machine's settings to the individual requirement of a particular device. Its intuitive user interface, along with comprehensive documentation, allows users without any prior experience to gain familiarity with the asset quickly and make full use of its advanced features. Overall, TEL ALPHA 303IK is an effective solution for thermal diffusion and fabrication, providing outstanding process accuracy and repeatability.