Used TEL / TOKYO ELECTRON Alpha 303i-K #293607142 for sale

TEL / TOKYO ELECTRON Alpha 303i-K
ID: 293607142
Furnace Process: Oxide anneal.
TEL / TOKYO ELECTRON Alpha 303i-K is a diffusion furnace and accessory equipment, designed for use in a variety of applications such as semiconductor wafer and photomask production, deposition and etching, and rapid thermal processes. TEL ALPHA 303IK offers high-performance and reliable operation in an energy efficient platform. TOKYO ELECTRON ALPHA 303 I K's diffusion furnace system is supported by three electrodes, two cathodes and one anode. The anode is a negative bias source which provides high field strength to the furnace. The two cathodes are capable of generating power levels up to 3KW, allowing the piece to reach such high temperature while consuming minimal power. The diffusion furnace is composed of a high temperature crucible; a temperature control unit; a thermometer to read the temperature inside the furnace; a cooling tower and space to introduce inert gases at high temperature; a heat mandrel; and electric power supply, to control the power distribution. The high temperature crucible is lined with a quartz tube, which ensures that the electric current is evenly distributed during the diffusion process. The thermometer is fitted with a temperature probe which is able to accurately detect the internal temperature of the furnace in real-time. The cooling tower and space allow the furnace to be cooled after the diffusion process with an inert gas such as nitrogen and argon. This is designed to maintain reliable operation under a variety of conditions, minimizing any oxidation which may occur after the diffusion process has been completed. Accessories such as bubblers, oxygen sensors, pumps, humidifiers and antistatic cages are also compatible with Alpha 303i-K. A special outlet is provided to allow the fast and reliable removal of water-based coolants and anti-oxidation agents after the diffusion process. In addition, TEL Alpha 303i-K comes equipped with warning alarms and emergency shut-off functionalities, ensuring a safe operation at all times. Overall, TEL ALPHA 303 I K is an advanced diffusion furnace unit that provides reliable and high-performance operation while consuming minimal power. With its combination of features, as well as its accessories, this machine is a great choice for a variety of applications.
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