Used TEL / TOKYO ELECTRON Alpha 303i-K #293618106 for sale
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ID: 293618106
Wafer Size: 12"
LPCVD Furnaces, 12"
Process: MTO
Heater type: VMM-56-002
Non-load lock
Gases:
N2
SiH4
N2O.
TEL / TOKYO ELECTRON Alpha 303i-K diffusion furnace & accessories is specifically designed to offer a reliable and advanced solution for production of high quality semiconductor devices. It is an advanced heating system that offers superior deposition uniformity, temperature accuracy and control. The 303i-K model consists of a diffusion furnace, crucibles, insulation material, bellows, vacuum pump and electronics cabinet. The diffusion furnace of TEL ALPHA 303IK is a stainless steel box with the anode on one side and the cathode on the other. It features a 23-point heating element, which is a special heat distribution system providing outstanding uniformity at all times. The crucibles are made of alumina and quartz materials with a capacity of 8" x 8" x 24". The insulation material is provided in the form of graphite sheets and insulating insulation tape, both offering excellent isolation and temperature control. The bellows is a special vacuum pump which works together with the insulation material to maintain the desired pressure during operations. The electronics cabinet of TOKYO ELECTRON ALPHA 303 I K consists of multiple components providing optimum control over the operations of the furnace. It includes a control panel featuring multiple user-friendly displays as well as electrical connectors for connecting the power supplies. Additionally, it offers a manually operated flow control system for adjusting the gas and pressure flow inside the chamber. TOKYO ELECTRON ALPHA 303IK diffusion furnace & accessories is an advanced yet reliable solution for the production of high-quality semiconductor devices. Its special heating element offers outstanding uniformity, temperature accuracy and control. It also features a convenient electronics cabinet, an efficient vacuum pump and insulation materials for excellent isolation and temperature control. This diffusion furnace & accessories is reliable, cost-effective and highly efficient, offering superior results and top-notch performance.
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