Used TEL / TOKYO ELECTRON Alpha 303i-K #9273546 for sale
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ID: 9273546
Wafer Size: 12"
Vintage: 2006
Furnace, 12"
MFC (N2, NH3, SiH2Cl2, N2O, SiH4)
L/L type
Heater: VOS-56-003
2006 vintage.
TEL / TOKYO ELECTRON Alpha 303i-K is a wafer diffusion furnace and accompanying accessories designed to create high-quality epitaxial layers. The 303i-K is coupled with an extensive control package that allows for complete customization of the diffusion parameters and the capability for monitoring, data logging and fine-tuning during the growth process. The 303i-K includes a high-performance quartz horizontal tube excellent thermal uniformity to ensure a high-quality epi layer. The robust design makes it highly resilient and durable, while the modern heating elements, constructed with high-tech alloys, provide a superior resistance to thermal shock and oxidation. It also features precise control of the internal environment enabling accurate temperature, gas flow and pressure profiling during the diffusion process. The 304i-K provides convenience with motorized material loading and unloading systems as well as automated processes reducing labor time and human error. In addition, temperature monitoring within the quartz tube ensures precise wafer temperature control enabling the user to achieve optimum material performance. The automated control system is connected to the 304i-K's Gas Control Unit (GCU) which oversees the automatic flow of the diffusion vapor to the quartz tube. The 304i-K comes with a package of fully adjustable software options allowing users to modify the parameters of their diffusion process. The heating profile of the 304i-K is also user customizable. The 304i-K is an important tool for semiconductor foundries allowing them to produce high-quality microelectronic devices and optimize the repeatability of their diffusion process. The 304i-K is an indispensable piece of equipment in the microelectronic industry providing users with improved efficiency and quality control.
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