Used TEL / TOKYO ELECTRON Alpha 303i-K #9274260 for sale
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ID: 9274260
Wafer Size: 12"
Vintage: 2003
Diffusion furnace, 12"
Process: Poly
GFC (SiH4, 0.1%PH3 / N2, CIF3)
2003 vintage.
TEL / TOKYO ELECTRON Alpha 303i-K diffusion furnace is a one-of-a-kind piece of equipment designed to produce high-quality diffusion and oxidizing processes at moderate temperatures. It is a cost-effective solution to producing precise, repeatable diffusions with just the right temperature, rate of cooling and residual oxidation. TEL ALPHA 303IK features a single crucible with a maximum capacity of 500g regardless of material. It is equipped with high-precision temperature control from from room temperature to 1300°C, and a full range of accessories to accommodate most material types and applications. Further, the furnace is designed to provide a homogeneous dwelt time perfect for semiconductor processes. The furnace also utilizes a series of dewax programs to maximize the diffusion process. The furnace boasts a suite of advanced safety features, including an over-temperature emergency switch for over-temperature protection, as well as dust prevention and external venting to optimize safety matters. The unit also features an LED indicator light, which turns green when the target temperature is reached, signifying that the diffusion process is complete. Additionally, the furnace uses a special Pyrex chamber to ensure a high level of insulation and uniform heating. TOKYO ELECTRON ALPHA 303 I K is equipped with an internal cooling fan for temperature and rate of cooling, as well as an access door for open/close system. It also comes with additional accessories, such as a base, roller, heater window, and timer. This allows users to customize the system to better accommodate their needs. In conclusion, TOKYO ELECTRON ALPHA 303IK from TEL is a reliable, cost-effective diffusion furnace that is perfect for producing precise, repeatable diffusion and oxidizing processes at moderate temperatures, delivering the highest quality diffusion result.
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