Used TEL / TOKYO ELECTRON Alpha 303i-K #9281997 for sale

ID: 9281997
Wafer Size: 12"
Vintage: 2006
Furnace, 12" MTO 2006 vintage.
TEL / TOKYO ELECTRON Alpha 303i-K is a diffusion furnace with accessories that offer a comprehensive solution for semiconductor processing applications. It offers superior temperature uniformity, low power consumption, and minimal contamination of the interior. Its advanced controls and automation enable users to precisely control the parameters, making it ideal for complex production processes. TEL ALPHA 303IK features a dual wafer capability with a maximum wafer diameter of 16 mm and a 25 mm heated surface. It utilises a 2.5 kHz He-Ne laser diode to accurately measure temperature and is capable of continuously heating the wafer to temperatures of up to 1200ºC. It also features a range of ancillary components, such as a lamp heater/dryer, automated wafer handling robots, wafer mover/rotation stages and laminar flow hoods, that can be combined to offer a complete semiconductor processing solution. TOKYO ELECTRON ALPHA 303 I K is also equipped with uptime readiness technology, allowing for easy setup and productivity monitoring during operation. The intuitive user interface and automated recipe optimization helps reduce programming errors and ensures consistent high quality results. The ozone-based cleaning module is able to thoroughly remove contamination from the wafer surface, thus preventing the accumulation of black residue during processing. The intelligent thermal controller provides precise temperature control and uniformity, allowing users to reduce power consumption and improve yields. The internal parts are designed to provide long-term reliability and are coated with a special durable material to help reduce maintenance issues. The high-performance pump reduces sampling time and offers fast diffusion of gases into the system. TOKYO ELECTRON ALPHA 303IK has built-in safety measures that prevent accidental exposure to harmful gases, and its well-ventilated design helps ensure a safe working environment. Finally, it also includes an automatic unlocking system, ensuring that the machine cannot be opened without the proper authorization. In conclusion, TOKYO ELECTRON Alpha 303i-K is an advanced diffusion furnace with accessories that provides excellent temperature uniformity, low power consumption, minimal contamination and reliable performance, making it an ideal choice for semiconductor processing applications.
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