Used TEL / TOKYO ELECTRON Alpha 303i-K #9282001 for sale

ID: 9282001
Wafer Size: 12"
Vintage: 2003
Furnace, 12" Poly 2003 vintage.
TEL / TOKYO ELECTRON Alpha 303i-K is a state-of-the-art diffusion furnace and accessories that feature advanced thermal processing and an increased process range. This diffusion furnace is capable of processing a wide range of materials, such as substrates including silicon, germanium, gallium-arsenide, and gallium-nitride. This diffusion furnace also comes with advanced controls, including ramp and soak options, as well as a programmable temperature and gas flow profile. The included accessories provide an extensive range of substrates, with available sizes ranging from 25 mm up to 300 mm. The combined size of the entrance/exit openings provide a maximum working temperature range of between 400 and 1100ᵒC. TEL ALPHA 303IK includes protection capabilities such as an over temperature alarm, metal contamination detection, and gas flow monitoring. It also features a high-performance automated clean cycle for easy maintenance. The diffusion furnace is designed with an adjustable chamber depth and wafer support system, allowing for uniform and even temperature distribution throughout the process. The diffusion furnace is also equipped with automated anti-spillage devices and an active cooling system, ensuring safe and optimum temperature control. Additionally, the diffusion furnace can be programmed to deposit phosphorus, arsenic, nitrogen, and other materials on a substrate or to perform specific substrate hybridization processes. The unique design of TOKYO ELECTRON ALPHA 303 I K makes it a highly precision tool for emerging nanotechnologies and MEMS products. The integrated advanced intelligent process control technology ensures repeatability and high reproducibility in the process results. Additionally, TEL Alpha 303i-K diffusion furnace offers user-friendly functionality, reducing the time and effort spent on manual setting changes. TEL ALPHA 303 I K provides superior process control, has been pre-tested and certified to meet international safety standards, and is backed with manufacturer warranties. It is an ideal choice for companies seeking high quality and reliable diffusion furnaces and accessories.
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